JPH0452751Y2 - - Google Patents
Info
- Publication number
- JPH0452751Y2 JPH0452751Y2 JP1988148479U JP14847988U JPH0452751Y2 JP H0452751 Y2 JPH0452751 Y2 JP H0452751Y2 JP 1988148479 U JP1988148479 U JP 1988148479U JP 14847988 U JP14847988 U JP 14847988U JP H0452751 Y2 JPH0452751 Y2 JP H0452751Y2
- Authority
- JP
- Japan
- Prior art keywords
- double
- pellicle
- sided adhesive
- adhesive tape
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002390 adhesive tape Substances 0.000 claims description 43
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 18
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 239000012790 adhesive layer Substances 0.000 description 9
- 229920001971 elastomer Polymers 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 229920005830 Polyurethane Foam Polymers 0.000 description 2
- 229920005549 butyl rubber Polymers 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 229920001084 poly(chloroprene) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000011496 polyurethane foam Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000007718 adhesive strength test Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988148479U JPH0452751Y2 (en]) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988148479U JPH0452751Y2 (en]) | 1988-11-16 | 1988-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0269332U JPH0269332U (en]) | 1990-05-25 |
| JPH0452751Y2 true JPH0452751Y2 (en]) | 1992-12-11 |
Family
ID=31419843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988148479U Expired JPH0452751Y2 (en]) | 1988-11-16 | 1988-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452751Y2 (en]) |
-
1988
- 1988-11-16 JP JP1988148479U patent/JPH0452751Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0269332U (en]) | 1990-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI423382B (zh) | 防塵薄膜組件剝離用夾具及剝離方法 | |
| JPS6075835A (ja) | ペリクル | |
| JPH0452751Y2 (en]) | ||
| JPH0449628Y2 (en]) | ||
| JP2005056625A (ja) | 電池パック及び電池パックの分解方法 | |
| JPH095982A (ja) | マスク保護装置の剥離方法 | |
| JPH08115896A (ja) | 半導体ウエハに付着した異物の除去用粘着テ―プと除去方法 | |
| JP2006163035A (ja) | 大型ペリクル、ペリクル搬送方法、ペリクルケース及びペリクル移載装置 | |
| JP3427241B2 (ja) | ペリクルのフォトマスクへの貼着構造 | |
| GB1562680A (en) | Doublesided self-adhesive sheet | |
| JP4478558B2 (ja) | 大型ペリクルの搬送方法、搬送用治具及びペリクルケース | |
| JPH0264540A (ja) | 発塵の防止されたペリクル | |
| JPS61169848A (ja) | マスク保護用ペリクルの剥離方法 | |
| JPH0812418B2 (ja) | ペリクルの製造方法 | |
| EP0989533B1 (en) | Multi-layered bulletin board | |
| JPH05232689A (ja) | ペリクル接着方法、ペリクル及びマスク | |
| JP2002258466A (ja) | ペリクル | |
| TWI770584B (zh) | 保護膜、曲面結構及保護膜貼附方法 | |
| JP4055856B2 (ja) | 大型ペリクル膜の製造方法 | |
| CN215627731U (zh) | 一种无残胶的uv减黏保护膜 | |
| JP3209095B2 (ja) | フォトマスクからのペリクル脱着方法 | |
| JP3206417B2 (ja) | ペリクル | |
| JP3026637B2 (ja) | ペリクル枠体の剥離法 | |
| JP2003202660A (ja) | ペリクルおよびペリクル付きマスクの製造方法 | |
| JPH04366846A (ja) | ペリクルをマスクから剥離する方法 |